Atomate LPCVD – Fully automated 3-zone furnace down to 20 mTorr
Renishaw Invia: Raman spectrometer
Desert Cryogenics TTP4 Probe Station Cryogenic micromanipulated probe station up to 2″ wafer at temperature between 4.2K-475K.
Ecopia HMS 3000 Hall Measurement System Hall measurements to determine the material’s resistivity, carrier concentration, P/N type, and mobility at 77K or 300K.
Fume Hood Safe chemical preparation and handling.
Agilent 4156C Semiconductor Parameter Analyzer 4x High-resolution SMU, 1 femtoamp and 0.2 microvolt measurement resolution, QSCV, Stress Mode, +/- 200 Volts and +/- 1 Amp High-Power SMU.